Mode of Operation
After the test article is instrumented with thermocouples and placed in the chamber, ground support equipment cabling is connected through penetration plates and ambient functional checks are performed. After roughing down the chamber with the rotary piston mechanical pump, ultimate pressure is achieved with the turbomolecular pump.
Parameters
Test Pressure: <13.3µPa (10-7 torr)
Shroud Temperature:+20°C to +150°C
Chamber Pumping Speed: 1,600 lit/sec @ 133 µPa
Physical Characteristics
Test Volume: 21" x 40"
Integral Instrumentation
Pressure: Capacitance manometer - Atm to 10-3 mmHg
Ion Gauge: 10-3 mmHg to ultimate
Payload Temperature: 18 thermocouple channels
Contamination Monitor: TQCM, coldfinger, residual gas analyzer
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